Generating electron cyclotron resonance plasma using distributed scheme
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4745189
Reference19 articles.
1. Fabrication of ultrathin Ni–Zn ferrite films using electron cyclotron resonance sputtering method
2. TE/sub 01/ excitation of an electron cyclotron resonance plasma source
3. Production of multicharged ions in a 2.45 GHz electron cyclotron resonance source directly excited in a circular TE01 mode cavity resonator
4. Effect of applied magnetic field on a microwave plasma thruster
5. Parallel particle-mesh code for ECR plasma simulation
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Development of multiple inductively coupled plasma sources using coaxial transmission line for large-area processes;Current Applied Physics;2016-03
2. Effect of magnetic field profile on the uniformity of a distributed electron cyclotron resonance plasma;Physics of Plasmas;2013-07
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