Solid phase epitaxial recrystallization of thin polysilicon films amorphized by silicon ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.93502
Reference5 articles.
1. cw laser anneal of polycrystalline silicon: Crystalline structure, electrical properties
2. MOSFET's on Silicon prepared by moving melt zone recrystallization of encapsulated polycrystalline Silicon on an insulating substrate
3. Low-temperature process to increase the grain size in polysilicon films
4. Grain Growth Mechanism of Heavily Phosphorus‐Implanted Polycrystalline Silicon
5. Evidence for void interconnection in evaporated amorphous silicon from epitaxial crystallization measurements
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3. Growth kinetics and crystallographic properties of polysilicon thin films formed by aluminium-induced crystallization;Journal of Crystal Growth;2007-07
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