Rapid Fabrication of 100 nm or Thinner Fully Depleted Silicon-on-Insulator Materials for Ultralow Energy Consumption-Reference-Cited by-同舟云学术

Rapid Fabrication of 100 nm or Thinner Fully Depleted Silicon-on-Insulator Materials for Ultralow Energy Consumption

Published:2018-04-24 Issue:5 Volume:1 Page:2414-2420
ISSN:2574-0970
Container-title:ACS Applied Nano Materials
language:en
Short-container-title:ACS Appl. Nano Mater.

Author:

Lee Benjamin T.-H.¹^ORCID,Huang Ching-Han¹,Ho Chia-Che¹,Lo Fa-Sain¹

Affiliation:

1. Department of Mechanical Engineering, National Central University, Taoyuan City 32001, Taiwan, ROC

Funder

Ministry of Science and Technology, Taiwan

Publisher

American Chemical Society (ACS)

Subject

General Materials Science

Link

https://pubs.acs.org/doi/pdf/10.1021/acsanm.8b00602

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