X-ray diffraction gratings: Precise control of ultra-low blaze angle via anisotropic wet etching
Author:
Affiliation:
1. Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
2. University of California, Berkeley, California 94720, USA
Funder
U.S. Department of Energy (DOE)
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/am-pdf/10.1063/1.4960203
Reference15 articles.
1. Gratings with Blaze Angles Down to 0.1° for Photon Energies up to 10 keV
2. Design of soft x-ray gratings for free electron lasers: from specification to characterization
3. Fabrication of extreme-ultraviolet blazed gratings by use of direct argon-oxygen ion-beam etching through a rectangular photoresist mask
4. A plane grating with single-layer coating for the sub-nanometer wavelength range
5. Orientation-Resolved Chemical Kinetics: Using Microfabrication to Unravel the Complicated Chemistry of KOH/Si Etching
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Single-Step Fabrication of Highly Tunable Blazed Gratings Using Triangular-Shaped Femtosecond Laser Pulses;Micromachines;2024-05-28
2. A high-efficiency programmable modulator for extreme ultraviolet light with nanometre feature size based on an electronic phase transition;Nature Photonics;2024-02-02
3. Silicon Echelles for Soft X-Ray and Extreme UV Radiation: Influence of the Camber of the Reflective Facet on the Diffraction Efficiency;Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques;2023-12
4. Roles of overlapped scratching in grating fabrications assisted by selective wet etching;Journal of Materials Science;2023-10
5. Three-Dimensional Printed Diffraction Gratings Drop Coated by Different Resins and Their Mechanism;Journal of Manufacturing Science and Engineering;2023-08-29
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3