The influence of surface properties on the plasma dynamics in radio-frequency driven oxygen plasmas: Measurements and simulations
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4841675
Reference30 articles.
1. Diagnostic based modeling for determining absolute atomic oxygen densities in atmospheric pressure helium-oxygen plasmas
2. Diagnostic based modelling of radio-frequency driven atmospheric pressure plasmas
3. Radio-frequency capacitively coupled plasmas excited by tailored voltage waveforms: comparison of experiment and particle-in-cell simulations
4. Improved fluid simulations of radio-frequency plasmas using energy dependent ion mobilities
5. Solving the Boltzmann equation to obtain electron transport coefficients and rate coefficients for fluid models
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