A study of electrostatic force nonlinearities in resonant microstructures-Reference-Cited by-同舟云学术

A study of electrostatic force nonlinearities in resonant microstructures

Published:2008-03-10 Issue:10 Volume:92 Page:104106
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Agarwal Manu,Chandorkar Saurabh A.,Mehta Harsh,Candler Robert N.,Kim Bongsang,Hopcroft Matthew A.,Melamud Renata,Jha Chandra M.,Bahl Gaurav,Yama Gary,Kenny Thomas W.,Murmann Boris

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2834707

Reference13 articles.

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3. 19th IEEE International Conference on Micro Electro Mechanical Systems (MEMS’06);Agarwal M.,2006

4. IEEE International Frequency Control Sympposium and PDA Exhibition Jointly with the 17th European Frequency and Time Forum;Lee S.,2003

5. Solid State Sensor, Actuator, and Microsystems Workshop;Agarwal M.,2006

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