Dielectric charging in capacitive microelectromechanical system switches with silicon nitride
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3560465
Reference25 articles.
1. Parasitic charging of dielectric surfaces in capacitive microelectromechanical systems (MEMS)
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5. Temperature study of the dielectric polarization effects of capacitive RF MEMS switches
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