A novel method for the assessment of surface charge density variance in capacitive RF-MEMS switches

Author:

Birmpiliotis D.,Koutsoureli M.,Papaioannou G.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Surfaces, Coatings and Films,Safety, Risk, Reliability and Quality,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference26 articles.

1. RF-MEMS for 5G applications: a reconfigurable 8-bit power attenuator working up to 110 GHz. Part 1: design concept, technology and working principles;Iannacci;Microsyst. Technol.,2020

2. RF-MEMS for 5G applications: a reconfigurable 8-bit power attenuator working up to 110 GHz. Part 2—experimental characterisation of the RF behaviour;Iannacci;Microsyst. Technol.,2020

3. The WEAF mnecosystem (water, earth, air, fire micro/nano ecosystem): a perspective of micro/nanotechnologies as pillars of future 6G and tactile internet (with focus on MEMS);Iannacci;Microsyst. Technol.,2021

4. On the modeling of dielectric charging in RF-MEMS capacitive switches;Papaioannou,2010

5. Modeling of dielectric charging in capacitive structures;Amiaud;J. Appl. Phys.,2015

Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Multi-contact series type RF MEMS switch with low pull-down voltage for THz band;2022 IEEE 5th Advanced Information Management, Communicates, Electronic and Automation Control Conference (IMCEC);2022-12-16

2. On the injected charge distribution and discharge currents in the dielectric films for MEMS capacitive switches;Microelectronics Reliability;2022-11

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