The study of thermal silicon dioxide electrets formed by corona discharge and rapid-thermal annealing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3559260
Reference36 articles.
1. Inorganic electret membrane for a silicon microphone
2. Silicon‐dioxide electret transducer
3. Silicon-based inorganic electrets for application in micromachined devices
4. Characteristics of a radiation-charged electret dosimeter
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