1. Microsystems, Actuators and Sensors Group, ETSI Industriales, Universidad de Castilla-La Mancha, Ciudad Real, 13071 Spain
2. Department of Electronics Engineering, Yarmouk University, Irbid, Jordan
3. Chair of Micromechanics, Microfluidics/Microactuators, Saarland University, D-66123 Saarbruecken, Germany