Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media-Reference-Cited by-同舟云学术

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Silicon-based micromembranes with piezoelectric actuation and piezoresistive detection for sensing purposes in liquid media

Published:2010-05-26 Issue:7 Volume:20 Page:075014
ISSN:0960-1317
Container-title:Journal of Micromechanics and Microengineering
language:
Short-container-title:J. Micromech. Microeng.

Author:

Alava T,Mathieu F,Mazenq L,Soyer C,Remiens D,Nicu L

Publisher

IOP Publishing

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Mechanics of Materials,Electronic, Optical and Magnetic Materials

Reference35 articles.

1. Suspended Microchannel Resonators for Ultralow Volume Universal Detection

2. Biomolecular detection with a thin membrane transducer

3. Detection of Gold Colloid Adsorption at a Solid/Liquid Interface Using Micromachined Piezoelectric Resonators

4. Combining Resonant Piezoelectric Micromembranes with Molecularly Imprinted Polymers

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