Observation of silicon wafer emissivity in rapid thermal processing chambers for pyrometric temperature monitoring
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.102874
Reference2 articles.
1. Spectral Emissivity of Silicon
2. Experimental Proof of the Existence of a New Electronic Complex in Silicon
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