Enhanced ion charge states in vacuum arc plasmas using a “current spike” method
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1150266
Reference9 articles.
1. Vacuum arc ion sources
2. The 100‐kV gas and metal ion source for high current ion implantation
3. Characterization of the Cathode Spot
4. Ion charge state distributions in high current vacuum arc plasmas in a magnetic field
5. Elevated ion charge states in vacuum arc plasmas in a magnetic field
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