Electromechanical instability of microscale structures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1496123
Reference11 articles.
1. Characteristics and fabrication of NiTi/Si diaphragm micropump
2. Surface micromachined capacitive ultrasonic transducers
3. Electrical modeling of a pressure sensor MOSFET
4. Adhesion release and yield enhancement of microstructures using pulsed Lorentz forces
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