Characteristics and fabrication of NiTi/Si diaphragm micropump

Author:

Xu Dong,Wang Li,Ding Guifu,Zhou Yong,Yu Aibing,Cai Bingchu

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference11 articles.

1. A thermo-pneumatic micropump based on microengineering techniques;Van de Pol;Sens. Actuators A,1990

2. C.H. Ahn, M.G. Allen, Fluid micropumps based on rotary magnetic actuators, in: Proceedings of the IEEE MEMS’95, Amsterdam, 1995, pp. 408–412.

3. A piezoelectric micropump based on micromachining of silicon;Van Lintel;Sens. Actuators,1988

4. A silicon membrane micropump with integrated bimetal actuator;Zhan;Chinese J. Electron.,1996

5. R. Zengerle, S. Kluge, M. Richter, A. Richter, A bi-directional silicon micropump, in: Proceedings of the IEEE MEMS’95, Amsterdam, 1995, pp. 19–24.

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