Author:
Xu Dong,Wang Li,Ding Guifu,Zhou Yong,Yu Aibing,Cai Bingchu
Subject
Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials
Reference11 articles.
1. A thermo-pneumatic micropump based on microengineering techniques;Van de Pol;Sens. Actuators A,1990
2. C.H. Ahn, M.G. Allen, Fluid micropumps based on rotary magnetic actuators, in: Proceedings of the IEEE MEMS’95, Amsterdam, 1995, pp. 408–412.
3. A piezoelectric micropump based on micromachining of silicon;Van Lintel;Sens. Actuators,1988
4. A silicon membrane micropump with integrated bimetal actuator;Zhan;Chinese J. Electron.,1996
5. R. Zengerle, S. Kluge, M. Richter, A. Richter, A bi-directional silicon micropump, in: Proceedings of the IEEE MEMS’95, Amsterdam, 1995, pp. 19–24.
Cited by
133 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献