In depth study of molybdenum silicon compound formation at buried interfaces
Author:
Affiliation:
1. FOM-DIFFER, P.O. Box 6336, 5600 HH Eindhoven, The Netherlands
2. Industrial Focus Group XUV Optics, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500 AE Enschede, The Netherlands
Funder
Stichting voor Fundamenteel Onderzoek der Materie (FOM)
Stichting voor de Technische Wetenschappen (STW)
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4962541
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5. Nanometer interface and materials control for multilayer EUV-optical applications
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