Intrinsic and boron-enhanced hydrogen diffusion in amorphous silicon formed by ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3224189
Reference18 articles.
1. Hydrogen diffusion and electronic metastability in amorphous silicon
2. Nanoclustering of hydrogen in ion-implanted and plasma-grown amorphous silicon
3. Hydrogen solubility and network stability in amorphous silicon
4. Diffusion of Hydrogen in Amorphous Silicon in the Low Concentration Regime
5. Solubility and diffusion of hydrogen in hydrogenated crystalline and amorphous silicon
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