Radio frequency, microwave, and electron cyclotron resonance ion sources for industrial applications: A review (invited)
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1146832
Reference54 articles.
1. Microwave ion source
2. Microwave ion source for high current metal beams
3. Electron Cyclotron Resonance Multiply Charged Ion Sources
4. Plasma processing of surfaces
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