Microwave ion source for high current metal beams-Reference-Cited by-同舟云学术

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Microwave ion source for high current metal beams

Published:1984-01 Issue:1-2 Volume:34 Page:245-249
ISSN:0042-207X
Container-title:Vacuum
language:en
Short-container-title:Vacuum

Author:

Noriyuki Sakudo ,Katsumi Tokiguchi ,Hidemi Koike

Publisher

Elsevier BV

Subject

Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation

Reference3 articles.

1. Microwave ion source for high‐current implanter

2. Ion Implantation Technique;Aitken;Springer series in Electrophysics,1982

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1. RF and Microwave Ion Sources Study at Institute of Modern Physics;Plasma;2021-06-06

2. Utilizing upper hybrid resonance for high density plasma production and negative ion generation in a downstream region;Journal of Applied Physics;2012-09-15

3. Development of a locally-electron-heated plasma source for HDP-CVD process;Vacuum;1998-12

4. Radio frequency, microwave, and electron cyclotron resonance ion sources for industrial applications: A review (invited);Review of Scientific Instruments;1996-03

5. Simultaneous mass-analyzed positive and negative low-energy ion beam deposition apparatus;Ion Beam Modification of Materials;1996

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