Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges-Reference-Cited by-同舟云学术

Contributed Review: Application of voice coil motors in high-precision positioning stages with large travel ranges

Published:2015-10 Issue:10 Volume:86 Page:101501
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Shan Guanqiao¹^ORCID,Li Yingzi¹,Zhang Liwen¹,Wang Zhenyu¹,Zhang Yingxu¹,Qian Jianqiang¹

Affiliation:

1. Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) and School of Physics and Nuclear Energy Engineering, Beihang University, Beijing 100191, China

Funder

National Natural Science Foundation of China (NSFC)

Natural Science Foundation of Beijing Municipality (Beijing Natural Science Foundation)

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4932580

Reference95 articles.

1. Design and implementation of an atomic force microscope with adaptive sliding mode controller for large image scanning

2. A millimeter-range flexure-based nano-positioning stage using a self-guided displacement amplification mechanism

3. Design, testing and precision control of a novel long-stroke flexure micropositioning system

4. Linear Motor-Powered Transportation: History, Present Status, and Future Outlook

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