Redistribution of constituent elements in Pd/Ge contacts ton‐type GaAs using rapid thermal annealing
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.357710
Reference20 articles.
1. Non‐alloyed ohmic contact ton‐GaAs by solid phase epitaxy
2. Low resistance Pd/Ge/Au and Ge/Pd/Au ohmic contacts ton‐type GaAs
3. Solid-phase regrowth of compound semiconductors by reaction-driven decomposition of intermediate phases
4. Stable and shallow PdIn ohmic contacts ton‐GaAs
5. Thermally stable Pd/Ge ohmic contacts ton‐type GaAs
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