Thin‐film adhesion changes induced by electron irradiation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.94705
Reference5 articles.
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3. Stopping cross sections and backscattering factors for 4He ions in matter Z = 1–92,
4. Ion beam lithography
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