Study of rf‐sputtered yttrium oxide films on silicon by capacitance measurements
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.359588
Reference9 articles.
1. The Anodic Oxidation of Yttrium Thin Films
2. Dielectric Properties of Y2O3Thin Films Prepared by Vacuum Evaporation
3. Yttrium oxide films prepared by electron-beam evaporation
4. Study of thermally oxidized yttrium films on silicon
5. Yttrium oxide/silicon dioxide: a new dielectric structure for VLSI/ULSI circuits
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