Piezoelectric characteristic of nanocrystalline AlN films obtained by pulsed laser deposition at room temperature
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3527924
Reference27 articles.
1. Fabrication Techniques and Properties of Piezoelectric Thin Films of ZnO and AlN
2. AlN films grown on diamond and silicon carbide
3. AlN epitaxial growth on atomically flat initially nitrided α-Al2O3 wafer
4. Control of preferential orientation of AlN films prepared by the reactive sputtering method
5. SAW characteristics of AlN films sputtered on silicon substrates
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