Laser chemical vapor deposition of selected area Fe and W films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.332154
Reference9 articles.
1. Laser chemical vapor deposition: A technique for selective area deposition
2. Investigation of Laser‐Enhanced Electroplating Mechanisms
3. Laser microphotochemistry for use in solid-state electronics
4. Laser‐induced chemical vapor deposition of polycrystalline Si from SiCl4
5. Summary Abstract: Properties of several types of films deposited by laser CVD
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