High mobility amorphous zinc oxynitride semiconductor material for thin film transistors
Author:
Affiliation:
1. Display and SunFab Solar Business Group, Applied Materials, Santa Clara, California 95054, USA
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Reference29 articles.
1. T. Minami, MRS Bull.MRSBEA0883-7694 25, 33 (2000).
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