Author:
Smith Roger,Shaw Marcus,Webb Roger P.,Foad Majeed A.
Subject
General Physics and Astronomy
Cited by
27 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ion Implantation;Silicon Technologies;2013-03-19
2. Trends in semiconductor defect engineering at the nanoscale;Materials Science and Engineering: R: Reports;2010-11
3. Front-end process modeling in silicon;The European Physical Journal B;2009-11-07
4. Molecular dynamics study of redeposition effect by Ar ion bombardments on Au, Pd(001);Journal of the Korean Vacuum Society;2008-03-30
5. Antisite defects in a chemical compound crystal caused by ion irradiation;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2007-05