Profiling of BaTiO3ion beam sputtering by optical spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.350261
Reference8 articles.
1. Reactive partially ionized beam deposition of BaTiO3thin films
2. Ion beam deposition ofinsitusuperconducting Y‐Ba‐Cu‐O films
3. Ion beam sputtering ofinsitusuperconducting Y‐Ba‐Cu‐O films
4. Energy Dependence of Angular Distributions of Sputtered Particles by Ion-Beam Bombardment at Normal Incidence
5. Sputtering of condensed noble gases by keV heavy ions
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1. Stoichiometry control during deposition by ion beam sputtering;Journal of Applied Physics;2002-10-15
2. Oxygen molecule is more effective than plasma on ultralow temperature growth of Bi2Sr2CuOx thin films by ion beam sputtering;Physica C: Superconductivity;2001-01
3. Effects of oxygen ion assist at 1–10 eV on growth of Bi2(Sr,Ca)2CuOx films at 540 °C by ion–beam sputtering;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;1997-07
4. Reactive IrO2 sputtering in reducing/oxidizing atmospheres;Journal of Materials Research;1995-02
5. Reactive Sputtiering in Oxidizing/Reducing Atmospheres;MRS Proceedings;1993
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