Stoichiometry control during deposition by ion beam sputtering
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1502916
Reference45 articles.
1. The characteristics of some metallic oxides prepared in high vacuum by ion beam sputtering
2. Single- and dual-ion-beam sputter deposition of titanium oxide films
3. Structural changes in ZnO/NiO artificial superlattices made by ion beam sputtering
4. (Ba+Sr)/Ti ratio dependence of the dielectric properties for (Ba0.5Sr0.5)TiO3 thin films prepared by ion beam sputtering
5. Heteroepitaxial growth of MgO films by dual ion beam sputtering
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1. Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries;Nanomaterials;2023-10-12
2. Stoichiometry of Silicon Dioxide Films Obtained by Ion-Beam Sputtering;Journal of Applied Spectroscopy;2018-03
3. Nucleation and crystallization of Li2O–Nb2O5 ternary compound thin films co-sputtered from LiNbO3 and Li2O targets;Thin Solid Films;2014-04
4. Growth, characterization and effect of substrate bias on ZnO prepared by reactive capillaritron ion beam sputtering deposition;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2010-05
5. Nitrogen-doped ZnO prepared by capillaritron reactive ion beam sputtering deposition;Applied Surface Science;2010-04
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