Single- and dual-ion-beam sputter deposition of titanium oxide films
Author:
Publisher
The Optical Society
Reference14 articles.
1. Ion Beam Sputter Deposition Of Optical Coatings
2. Deposition of optical thin films by ion beam sputtering
3. The use of ion beam sputtered optical coatings as protective overcoats
4. Properties of silicon and aluminum oxide thin films deposited by dual ion beam sputtering
5. Ion beam sputtering of ZnS thin films
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