Infrared spectroscopy of thin silicon dioxide on silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.100487
Reference23 articles.
1. Oxidation of Silicon: Stress Relaxation in Silica
2. A Growth Model for the Variable Index of Refraction of Thermal Oxides on Silicon
3. Stress in thermal SiO2during growth
4. On the Kinetics of the Thermal Oxidation of Silicon: II . Some Theoretical Evaluations
5. The Effect of Surface Orientation on Silicon Oxidation Kinetics
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