Simultaneous monitoring of multimetallic atom densities in plasma processes employing a multimicrohollow cathode lamp
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2751104
Reference17 articles.
1. Arrays of silicon microdischarge devices with multicomponent dielectrics
2. Radio-frequency microdischarge arrays for large-area cold atmospheric plasma generation
3. Microhollow cathode discharges
4. Dielectric barrier hollow cathode discharge and its enhanced performance for light source
5. High-pressure hollow cathode discharges
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2. Properties of Indium–Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp;Japanese Journal of Applied Physics;2012-11-01
3. Properties of Indium–Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp;Japanese Journal of Applied Physics;2012-10-29
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5. Line-Profiles and Translational Temperatures of Pb Atoms in Multi-Micro Hollow Cathode Lamp Measured by Diode Laser Absorption Spectroscopy;Japanese Journal of Applied Physics;2012-08-01
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