Properties of Indium–Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp-Reference-Cited by-同舟云学术

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Properties of Indium–Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp

Published:2012-11-01 Issue:11R Volume:51 Page:116202
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Inoue Mari,Ohta Takayuki,Takota Naoki,Tsuchitani Shigeki,Takashima Seigo,Yamakawa Koji,Kano Hiroyuki,Takeda Keigo,Hori Masaru,Ito Masafumi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference47 articles.

1. Effects of Oxygen Concentration on Characteristics of RF-Sputtered In2O3–ZnO Thin Films

2. High mobility undoped amorphous indium zinc oxide transparent thin films

3. A study of conduction in the transition zone between homologous and ZnO-rich regions in the In2O3–ZnO system

4. Preparation of transparent and conductive In2O3–ZnO films by radio frequency magnetron sputtering

5. Electrical and Optical Properties of In2O3–ZnO Films Deposited on Polyethylene Terephthalate Substrates by Radio Frequency Magnetron Sputtering

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2. Photovoltaic application of architecture ITO/graphene oxide–polyaniline/aluminum;Journal of Materials Science: Materials in Electronics;2016-06-03

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