Impact energy and retained dose uniformity in enhanced glow discharge plasma immersion ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3204697
Reference13 articles.
1. Experimental investigation of hybrid-evaporation-glow discharge plasma immersion ion implantation
2. Hybrid evaporation: Glow discharge source for plasma immersion ion implantation
3. Evaporation–glow discharge hybrid source for plasma immersion ion implantation
4. Investigation of plasma distribution in electron-focused electric field enhanced glow discharge plasma immersion ion implantation
5. Theoretical investigation of sheath expansion and implant fluence uniformity in enhanced glow discharge plasma immersion ion implantation
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2. Improved ion implant fluence uniformity in hydrogen enhanced glow discharge plasma immersion ion implantation into silicon;Review of Scientific Instruments;2014-06
3. Limited Sheath-Collision for Plasma Immersion Ion Implantation and its Influence on Impact Energy and Dose Uniformity;IEEE Transactions on Plasma Science;2013-06
4. Transformation of Enhanced Glow Discharge Dynamics in Nitrogen Plasma Immersion Ion Implantation;IEEE Transactions on Plasma Science;2013-03
5. Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC model;Acta Physica Sinica;2012
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