Theoretical investigation of sheath expansion and implant fluence uniformity in enhanced glow discharge plasma immersion ion implantation
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2977962
Reference13 articles.
1. Experimental investigation of hybrid-evaporation-glow discharge plasma immersion ion implantation
2. Hybrid evaporation: Glow discharge source for plasma immersion ion implantation
3. Evaporation–glow discharge hybrid source for plasma immersion ion implantation
4. Effects of electron-focusing electric field upon enhanced glow discharge plasma ion implantation
5. Investigation of plasma distribution in electron-focused electric field enhanced glow discharge plasma immersion ion implantation
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