X-ray photoelectron spectroscopy study of rapid thermal annealed silicon–silicon oxide systems
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.365278
Reference11 articles.
1. Exploratory Observations of Effect of Rapid Thermal Processing on Silicon Minority Carrier Lifetime Using Laser Microwave Photoconductance Method
2. Effect of rapid thermal annealing on the structural and electrical properties of a silicon‐silicon oxide system
3. Experimental Observations of the Chemistry of the SiO2/Si Interface
4. SiSiO2 interface characterization by ESCA
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