A precision piezodriven micropositioner mechanism with large travel range-Reference-Cited by-同舟云学术

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A precision piezodriven micropositioner mechanism with large travel range

Published:1998-04 Issue:4 Volume:69 Page:1785-1791
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Chang S. H.,Du B. C.

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.1148842

Reference7 articles.

1. Piezodriven 50‐μm range stage with subnanometer resolution

2. Piezodriven scanner for cryogenic applications

3. A Piezo-Driven 3D Positioning Mechanism with Single-Stage Structure.

4. Maximizing the output power of a CO/sub 2/ laser using the Taguchi technique

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