Measurement of spatially resolved gas‐phase plasma temperatures by optical emission and laser‐induced fluorescence spectroscopy
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.332514
Reference34 articles.
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3. A spectroscopic investigation of the OCS discharge system
4. High resolution absorption and emission spectroscopy of a silane plasma in the 1800–2300 cm−1 range
5. Determination of Plasma Gas Temperature during Reactive Sputter Etching
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