Improved hydrogenated amorphous silicon thin films by photon assisted microwave electron cyclotron resonance chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.122954
Reference11 articles.
1. Amorphous silicon solar cell
2. Deposition of Device Quality, Low H Content a-Si:H by the Hot Wire Technique
3. Improved Amorphous Silicon Solar Cells Using RPCVD
4. Preparation of doped hydrogenated amorphous silicon films by microwave electron‐cyclotron‐resonance plasma discharge deposition
5. Amorphous silicon/p-type crystalline silicon heterojunction solar cells
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Rigid amorphous silicon network from hydrogenated and fluorinated precursors in ECR-CVD;Solar Energy Materials and Solar Cells;2004-02-06
2. Effects of visible light illumination during plasma enhanced chemical vapor deposition growth on the film properties of hydrogenated amorphous silicon;Journal of Applied Physics;2002-01-15
3. PLASMA DEPOSITION OF MICROCRYSTALLINE SILICON: THE ROLE OF PLASMA-SURFACE INTERACTION ON THE MICROSTRUCTURE;Handbook of Surfaces and Interfaces of Materials;2001
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