Preparation of cubic boron nitride films by low pressure inductively coupled plasma enhanced chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.111001
Reference15 articles.
1. LXVI.On the origin of the electrodeless discharge
2. High-density plasma mode of an inductively coupled radio frequency discharge
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