Elemental evolution of the SiOxFy self-masking layer of plasma textured silicon and its modification during air exposure-Reference-Cited by-同舟云学术

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Elemental evolution of the SiOxFy self-masking layer of plasma textured silicon and its modification during air exposure

Published:2017-02-14 Issue:6 Volume:121 Page:063301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Gaudig Maria¹²,Hirsch Jens¹,Naumann Volker³,Werner Martina³,Großer Stephan³,Hagendorf Christian³,Bernhard Norbert¹,Lausch Dominik³^ORCID

Affiliation:

1. Photovoltaics Group, Anhalt University of Applied Sciences, Bernburger Str. 55, 06366 Köthen, Germany

2. Group μMD, Institute of Physics, Martin Luther University Halle-Wittenberg, Heinrich-Damerow-Str. 4, 06120 Halle (Saale), Germany

3. Fraunhofer Center for Silicon Photovoltaics CSP, 06120 Halle (Saale), Germany

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4976007

Reference32 articles.

1. Black silicon: fabrication methods, properties and solar energy applications

2. Black Silicon Photovoltaics

3. An 18.2%-efficient black-silicon solar cell achieved through control of carrier recombination in nanostructures

4. Nano-cones on micro-pyramids: modulated surface textures for maximal spectral response and high-efficiency solar cells

5. Black silicon solar cells with interdigitated back-contacts achieve 22.1% efficiency

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1. Investigations on black silicon nanostructures fabricated by reactive ion etching on highly curved surfaces;Materials Science in Semiconductor Processing;2023-10

2. Cryogenic nanoscale etching of silicon nitride selectively to silicon by alternating SiF₄/O₂ and Ar plasmas;Journal of Vacuum Science & Technology A;2022-09

3. Tribological Properties of Lubricating Grease Additives Made of Silica and Silicon Carbide Nanomaterials;Integrated Ferroelectrics;2022-05-04

4. Quasi In Situ XPS on a SiO_xF_y Layer Deposited on Silicon by a Cryogenic Process;ECS Journal of Solid State Science and Technology;2022-01-01

5. Morphology evolution of the light trapping structure using atmospheric plasma textured c-Si wafer for silicon solar cells;Journal of Applied Physics;2021-07-14

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