High energy negative ions in a radio‐frequency discharge
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.362569
Reference8 articles.
1. Glow-discharge sheath electric fields: Negative-ion, power, and frequency effects
2. Negative hydrogenated silicon ion clusters as particle precursors in RF silane plasma deposition experiments
3. Modeling and measurements of the negative ion flux from amplitude modulated rf discharges
4. Mass spectrometer-wall probe diagnostic of Ar discharges containing SF6 and/or O2: Reactive ions in etching plasmas
5. Plasma potentials of 13.56‐MHz rf argon glow discharges in a planar system
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