Impurity decoration of defects in float zone and polycrystalline silicon via chemomechanical polishing
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.109308
Reference11 articles.
1. Neutralization of Acceptors and Formation of Agglomerates in Silicon Wafers Due to Intrinsic Point Defects Created by Chemomechanical Polishing and by Quenching
2. On the Hydrogen Content of Commercial Silicon Wafers
3. Ultrafast diffusion of a defect in indium‐doped silicon introduced by chemomechanical polishing
4. A Model to Explain the Electrical Behavior of P‐Type Silicon Surfaces after a Chemical Treatment
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