Low temperature photo-oxidation of silicon using a xenon excimer lamp
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120230
Reference18 articles.
1. Magnetically Excited Plasma Oxidation of Si
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4. Low temperature oxidation of crystalline silicon using excimer laser irradiation
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