Non‐mass‐separated ion shower doping of polycrystalline silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.355782
Reference7 articles.
1. Highly Efficient, Large-Area Polycrystalline Silicon Solar Cells Fabricated Using Hydrogen Passivation Technology
2. Development of a four-electrode extraction system for a large area ion source with a wide range of operational conditions
3. Advanced Superthin Polysilicon Film Obtained by Si+ Implantation and Subsequent Annealing
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2. Thermal Activation in Ion-shower-doped Poly-Si;Journal of the Korean Physical Society;2011-02-15
3. Reverse annealing of boron doped polycrystalline silicon;Thin Solid Films;2008-07
4. Annealing Behavior after Ion Shower Doping for the Fabrication of LTPS-TFTs;Solid State Phenomena;2007-06
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