Enhanced piezoelectric properties of (110)-oriented PbZr1−xTixO3 epitaxial thin films on silicon substrates at shifted morphotropic phase boundary
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4867477
Reference20 articles.
1. Recent Progress in Materials Issues for Piezoelectric MEMS
2. Giant Piezoelectricity on Si for Hyperactive MEMS
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4. Piezoelectric Thin Films for Sensors, Actuators, and Energy Harvesting
5. The realization and performance of vibration energy harvesting MEMS devices based on an epitaxial piezoelectric thin film
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