Hydrodynamic loading and viscous damping of patterned perforations on microfabricated resonant structures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4704144
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1. Micro- and nanomechanical sensors for environmental, chemical, and biological detection
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