Direct characterization of hydrodynamic loading on a microelectromechanical systems microstructure-Reference-Cited by-同舟云学术

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Direct characterization of hydrodynamic loading on a microelectromechanical systems microstructure

Published:2016-03-14 Issue:11 Volume:108 Page:114101
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Mehrnezhad Ali¹,Bashir Rashid²³,Park Kidong¹

Affiliation:

1. Division of Electrical and Computer Engineering, Louisiana State University, Baton Rouge, Louisiana 70803, USA

2. Department of Bioengineering, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA

3. Micro and Nanotechnology Laboratory, University of Illinois at Urbana-Champaign, Urbana, Illinois 61801, USA

Funder

Louisiana Board of Regents (Board of Regents)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4944412

Reference24 articles.

1. Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope

2. Hydrodynamic loading of microcantilevers vibrating in viscous fluids

3. Hydrodynamic effects in fast AFM single-molecule force measurements

4. Suspended plate microresonators with high quality factor for the operation in liquids

5. Nanomechanical resonators and their applications in biological/chemical detection: Nanomechanics principles

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