Suspended plate microresonators with high quality factor for the operation in liquids
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4875910
Reference13 articles.
1. Ultrasensitive nanoelectromechanical mass detection
2. Liquid-Phase Chemical and Biochemical Detection Using Fully Integrated Magnetically Actuated Complementary Metal Oxide Semiconductor Resonant Cantilever Sensor Systems
3. Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope
4. Characteristics of laterally vibrating resonant microcantilevers in viscous liquid media
5. Thermal Excitation and Piezoresistive Detection of Cantilever In-Plane Resonance Modes for Sensing Applications
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