High‐performance thin‐film transistors from optimized polycrystalline silicon films

Author:

Meakin D. B.,Coxon P. A.,Migliorato P.,Stoemenos J.,Economou N. A.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 58 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Growth of high-crystallinity silicon films by a combination of intermittent pulse heating and plasma-enhanced chemical vapor deposition;Japanese Journal of Applied Physics;2022-06-13

2. Trends in performance characteristics and modelling of oxide based TFT;Materials Today: Proceedings;2022

3. High-Quality Polysilicon Thin Film Recrystallization by Laser Annealing;Advanced Materials Research;2011-11

4. Flat-panel electronic displays: a triumph of physics, chemistry and engineering;Philosophical Transactions of the Royal Society A: Mathematical, Physical and Engineering Sciences;2010-03-13

5. Poly-Si TFTs by Direct Deposition Methods;Thin Film Transistors;2004

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